SPUTTERING MAGNETRONS POWER SUPPLIES

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DC magnetron, ion sources, and bias power supplies

All our magnetrons, ion sources, and bias power supplies have the same user interface as shown above



DC magnetron power supplies MPS Series produce single polarity negative pulsed output voltage. They are current sources with voltage limitation, so any load mode is operating mode and doesn't stop power supply work.

MPS power supplies also provide ignition voltage which is two times more than its nominal voltage (1000 V power supply provides 2000 V to an open circuit). It facilitates magnetron discharge ignition and allows better use a power supply overall power.

Power supplies have arc suppression mode which may be disabled. If arc suppression is disabled, in case of breakdown in the load, power supply continues supply the set current which is not increasing when arc appears. The output voltage drops to a value determined by the load resistance. Usually it is OK to stop an arc development and get back to the normal operation mode.

If arc suppression mode is enabled, in case of breakdown in the load and voltage decreasing, power supply turns off the output current for a few milliseconds, then turns it on again. Arc counter works in enabled arc suppression mode.

  • Control - local from the front panel or remote via interface RS232/RS485, Modbus RTU, SLIP, or dry contacts;
  • Remote parameters control via serial interface RS232/RS485;
  • Remote output voltage ON/OFF via external dry contacts;
  • Sound alarm if the unit temperature is close to a critical value and when active arc suppression acts;
  • OLED display with a few operation modes. Selectable interface language - English or Russian;
  • Cooling - forced air (possible option - water cooling at big powers);
  • External interlock input and output of ON state indicator;
  • Modes of passive arc suppression and active arc suppression with controlled value of threshold voltage;
  • Load grounding monitoring - if load grounding is broken, output voltage switches off (power supply must be firmly grounded);
  • Output voltage switch off mode in case of short circuit in the load;
  • To increase the power a few units may be connected in parallel to power a common load (IMPORTANT: only units with the same output voltage may be connected in parallel). Any unit of such group can be assigned as a master to control all other units);
  • Power supplies are designed for continues round the clock work.

The output current and voltage average values for the period and active power values are shown in the Table below for the DC magnetron power supplies nomenclature:



Model Height, U Power, kW Current, A Voltage, V
MPS 2-3-7,5-400-PC 2 3 7,5 400
MPS 2-3-6-500-PC 2 3 6 500
MPS 2-3-5-600-PC 2 3 5 600
MPS 2-3-4,5-700-PC 2 3 4,5 700
MPS 2-3-4-800-PC 2 3 4 800
MPS 2-3-3,5-900-PC 2 3 3,5 900
MPS 2-3-3-1000-PC 2 3 3 1000
MPS 2-3-2,7-1100-PC 2 3 2,7 1100
MPS 3-5-12,5-400-PC 3 5 12,5 400
MPS 3-5-10-500-PC 3 5 10 500
MPS 3-5-9-600-PC 3 5 9 600
MPS 3-5-7-700-PC 3 5 7 700
MPS 3-5-6-800-PC 3 5 6 800
MPS 3-5-5,5-900-PC 3 5 5,5 900
MPS 3-5-5-1000-PC 3 5 5 1000
MPS 3-5-4,5-1100-PC 3 5 4,5 1100
MPS 3-10-25-400-PC 3 10 25 400
MPS 3-10-20-500-PC 3 10 20 500
MPS 3-10-17-600-PC 3 10 17 600
MPS 3-10-15-700-PC 3 10 15 700
MPS 3-10-12-800-PC 3 10 12 800
MPS 3-10-11-900-PC 3 10 11 900
MPS 3-10-10-1000-PC 3 10 10 1000
MPS 3-10-9-1100-PC 3 10 9 1100
Output voltage: Single polarity negative pulsed
Pulse repetition rate 132 kHz
Controlled level of average current stabilization, in the range 10% - 100%
Stabilized average current control step 0.01 A
Controlled level of average voltage stabilization, in the range 30% - 100%
Stabilized average voltage control step 1 V
Controlled level of active power stabilization, in the range/td> 10% - 100%
Stabilized active power control step 0.01 kW
Ignition voltage, no less than 2Umax
Power 3 ph x 220/380VAC +10%, -15%, 45-65 Hz
Power supply up to 3 kW overall dimensions 19", 2U
Power supply up to 10 kW overall dimensions 19", 3U

AC dual magnetron power supplies MPS.....AC Series produce AC pulsed output voltage with symmetric half-waves. They are current sources with voltage limitation, so any load mode is operating mode and doesn't stop power supply work.

Power supplies have automatic arc suppression.

  • Control - local from the front panel or remote via interface RS232/RS485, Modbus RTU, SLIP, or dry contacts;
  • Remote parameters control via serial interface RS232/RS485;
  • Remote output voltage ON/OFF via external dry contacts;
  • Sound alarm if the unit temperature is close to a critical value and when active arc suppression acts;
  • OLED display with a few operation modes. Selectable interface language - English or Russian;
  • Cooling - forced air (possible option - water cooling at big powers);
  • External interlock input and output of ON state indicator;
  • To increase the power a few units may be connected in parallel to power a common load (IMPORTANT: only units with the same output voltage may be connected in parallel). Any unit of such group can be assigned as a master to control all other units);
  • Power supplies are designed for continues round the clock work.

The output current and voltage RMS values and active power values are shown in the Table below for the DC magnetron power supplies nomenclature:



Model Height, U Power, kW Current, A Voltage, V
MPS 2-3-7,2-500-АC 2 3 7,2 500
MPS 2-3-6-600-АC 2 3 6 600
MPS 2-3-4,5-800-АC 2 3 4,5 800
MPS 2-3-3,6-1000-АC 2 3 3,6 1000
MPS 2-3-3-1200-АC 2 3 3 1200
MPS 2-3-2,4-1500-АC 2 3 2,4 1500
MPS 3-5-12-500-АC 3 5 12 500
MPS 3-5-10-600-АC 3 5 10 600
MPS 3-5-7,5-800-АC 3 5 7,5 800
MPS 3-5-6-1000-АC 3 5 6 1000
MPS 3-5-5-1200-АC 3 5 5 1200
MPS 3-5-4-1500-АC 3 5 4 1500
MPS 3-10-24-500-АC 3 10 24 500
MPS 3-10-20-600-АC 3 10 20 600
MPS 3-10-15-800-АC 3 10 15 800
MPS 3-10-12-1000-АC 3 10 12 1000
MPS 3-10-10-1200-АC 3 10 10 1200
MPS 3-10-8-1500-АC 3 10 8 1500
Output voltage: AC
Pulse repetition rate 66 kHz
Controlled level of average current stabilization, in the range 10% - 100%
Stabilized average current control step 0.01 A
Controlled level of average voltage stabilization, in the range 30% - 100%
Stabilized average voltage control step 1 V
Controlled level of active power stabilization, in the range/td> 10% - 100%
Stabilized active power control step 0.01 kW
Power 3 ph x 220/380VAC +10%, -15%, 45-65 Hz
Power supply up to 3 kW overall dimensions 19", 2U
Power supply up to 10 kW overall dimensions 19", 3U
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VECOR 101 Duranzo Aisle, Irvine, CA92606, USA
Phone: +1-949-394-4466 * Fax: +1-949-451-6813 * E-mail: info@vecorus.com