ION SOURCES POWER SUPPLIES

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DC magnetron, ion sources, and bias power supplies

All our DC magnetron, ion sources, and bias power supplies have the same user interface as shown above


Anode layer ion source power supplies PS Series produce positive DC output voltage. They are current sources with voltage limitation, so any load mode is operating mode and doesn't stop power supply work.

  • Control - local from the front panel or remote via interface RS232/RS485, Modbus RTU, SLIP, or dry contacts;
  • Remote parameters control via serial interface RS232/RS485;
  • Remote output voltage ON/OFF via external dry contacts;
  • Sound alarm if the unit temperature is close to a critical value;
  • OLED display with a few operation modes. Selectable interface language - English or Russian;
  • Cooling - forced air (possible option - water cooling at big powers);
  • External interlock input and output of ON state indicator;
  • Modes of passive arc suppression and active arc suppression with controlled value of threshold voltage;
  • Load grounding monitoring - if load grounding is broken, output voltage switches off (power supply must be firmly grounded);
  • To increase the power a few units may be connected in parallel to power a common load (IMPORTANT: only units with the same output voltage may be connected in parallel). Any unit of such group can be assigned as a master to control all other units);


Model Height, U Power, kW Current, A Voltage, V
PS 2-3-1,5-2000-DC 2 3 1,5 2000
PS 2-3-1,2-2500-DC 2 3 1,2 2500
PS 2-3-1-3000-DC 2 3 1 3000
PS 2-3-0,9-3500-DC 2 3 0,9 3500
PS 2-3-0,8-4000-DC 2 3 0,8 4000
PS 3-5-2,5-2000-DC 3 5 2,5 2000
PS 3-5-2-2500-DC 3 5 2 2500
PS 3-5-1,7-3000-DC 3 5 1,7 3000
PS 3-5-1,4-3500-DC 3 5 1,4 3500
PS 3-5-1,3-4000-DC 3 5 1,3 4000
Output voltage: Positive DC
Controlled level of current stabilization, in the range 10% - 100%
Stabilized output current control step 0.01 A
Controlled level of voltage stabilization, in the range 30% - 100%
Stabilized voltage control step 1 V
Controlled level of active power stabilization, in the range 10% - 100%
Stabilized power control step 0.01 kW
Power 3 ph x 220/380VAC +10%, -15%, 45-65 Hz
Power supply up to 3 kW overall dimensions 19", 2U
Power supply up to 5 kW overall dimensions 19", 3U

End Hall and close drift ion sources power supplies IPS Series produce single polarity positive pulsed output voltage. They are current sources with voltage limitation, so any load mode is operating mode and doesn't stop power supply work.

  • Output: anode voltage, filament current, solenoid current;
  • Control of four mass flow controllers (MFC);
  • Neutralizer filament emission curent monitoring;
  • Ratio Emission current/Discharge current stabilization;
  • Anode voltage stabilization via operation gas flow control at constant discharge current;
  • Neutralizer filament resistance monitoering;
  • Sound alarm and anode voltage tuns off if filament resistance increases more than 10 Ohm;
  • Control - local from the front panel or remote via interface RS232/RS485, Modbus RTU, SLIP, or dry contacts;
  • Remote parameters control via serial interface RS232/RS485;
  • Remote output voltage ON/OFF via external dry contacts;
  • Sound alarm if the unit temperature is close to a critical value;
  • OLED display with a few operation modes. Selectable interface language - English or Russian;
  • Cooling - forced air (possible option - water cooling at big powers);
  • External interlock input and output of ON state indicator;
  • Load grounding monitoring - if load grounding is broken, output voltage switches off (power supply must be firmly grounded);
  • To increase the power a few units may be connected in parallel to power a common load (IMPORTANT: only units with the same output voltage may be connected in parallel). Any unit of such group can be assigned as a master to control all other units);
Power supplies with custom specifications are available.

The output current and voltage RMS values and active power values are shown in the Table below for the End Hall and close drift ion sources power supplies nomenclature:

Typical parameters of anode channel

Model Power, kW Current, A Voltage, V
IPS–3-3-15-200 3 15 200
IPS–3-3-10-300 3 10 300
IPS–3-3-7,5-400 3 7,5 400
IPS–3-3-6-500 3 6 500
IPS–3-3-5-600 3 5 600
IPS–3-5-25-200 5 25 200
IPS–3-5-16,5-300 5 16,5 300
IPS–3-5-12,5-400 5 12,5 400
IPS–3-5-10-500 5 10 500
IPS–3-5-8,3-600 5 8,3 600
Anode channel
Output power up to 5 kW
Output voltage: Positive DC
Controlled level of current stabilization, in the range 10% - 100%
Stabilized output current control step 0.01 A
Controlled level of voltage stabilization, in the range 30% - 100%
Stabilized voltage control step 1 V
Controlled level of power stabilization, in the range 10% - 100%
Stabilized power control step 0.01 kW
Maximal operating voltage Umax up to 500 V
Output parameters rise ramp time Controlled
Anode channel ON delay time after the cathode filament is heated up Controlled
Cathode filament channel
Output voltage AC, frequency 22 kHz
Output power up to 1 kW
Controlled level of RMS current stabilization, in the range 10% - 100%
Stabilized output current control step 0.01 A
Controlled level of RMS voltage stabilization, in the range 30% - 100%
Stabilized voltage control step 1 V
Controlled level of active power stabilization, in the range 10% - 100%
Stabilized power control step 0.01 kW
Output parameters rise ramp time Controlled
Anode channel ON delay time after the cathode filament is heated up Controlled
Number of independed filaments 2
Solenoid channel
Output power up to 300 W
Output voltage: DC up to 25 V
Controlled level of current stabilization, in the range 1 A - 11 A
Stabilized output current control step 0.01 A
Power 3 ph x 220/380VAC +10%, -15%, 45-65 Hz
Overall dimensions 19", 3U
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Phone: +1-949-394-4466 * Fax: +1-949-451-6813 * E-mail: info@vecorus.com