PULSED BIAS POWER SUPPLIES

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DC magnetron, ion sources, and bias power supplies

All our DC magnetron, ion sources, and bias power supplies have the same user interface as shown above


Bias power supplies BPS Series produce single polarity negative pulsed output voltage. They are current sources with voltage limitation, so any load mode is operating mode and doesn't stop power supply work.

Power supplies have arc suppression mode which may be disabled. If arc suppression is disabled, in case of breakdown in the load, power supply continues supply the set current which is not increasing when arc appears. The output voltage drops to a value determined by the load resistance. Usually it is OK to stop an arc development and get back to the normal operation mode.

If arc suppression mode is enabled, in case of breakdown in the load and voltage decreasing, power supply turns off the output current for a few milliseconds, then turns it on again. Arc counter works in enabled arc suppression mode.

  • Control - local from the front panel or remote via interface RS232/RS485, Modbus RTU, SLIP, or dry contacts;
  • Remote parameters control via serial interface RS232/RS485;
  • Remote output voltage ON/OFF via external dry contacts;
  • Sound alarm if the unit temperature is close to a critical value and when active arc suppression acts;
  • OLED display with a few operation modes. Selectable interface language - English or Russian;
  • Cooling - forced air (possible option - water cooling at big powers);
  • External interlock input and output of ON state indicator;
  • Modes of passive arc suppression and active arc suppression with controlled value of threshold voltage;
  • Load grounding monitoring - if load grounding is broken, output voltage switches off (power supply must be firmly grounded);
  • Output voltage switch off mode in case of short circuit in the load;
  • To increase the power a few units may be connected in parallel to power a common load (IMPORTANT: only units with the same output voltage may be connected in parallel). Any unit of such group can be assigned as a master to control all other units);
  • Power supplies are designed for continues round the clock work.

The output current and voltage average values for the period and active power values are shown in the Table below for the DC magnetron power supplies nomenclature:



Model Height, U Power, kW Current, A Voltage, V
BPS 2-3-7,5-400-PC 2 3 7,5 400
BPS 2-3-6-500-PC 2 3 6 500
BPS 2-3-5-600-PC 2 3 5 600
BPS 2-3-4,5-700-PC 2 3 4,5 700
BPS 2-3-4-800-PC 2 3 4 800
BPS 2-3-3,5-900-PC 2 3 3,5 900
BPS 2-3-3-1000-PC 2 3 3 1000
BPS 2-3-2-1500-PC 2 3 2 1500
BPS 2-3-1,5-2000-PC 2 3 1,5 2000
BPS 3-5-12,5-400-PC 3 5 12,5 400
BPS 3-5-10-500-PC 3 5 10 500
BPS 3-5-9-600-PC 3 5 9 600
BPS 3-5-7-700-PC 3 5 7 700
BPS 3-5-6-800-PC 3 5 6 800
BPS 3-5-5,5-900-PC 3 5 5,5 900
BPS 3-5-5-1000-PC 3 5 5 1000
BPS 3-5-3,5-1500-PC 3 5 3,5 1500
BPS 3-5-2,5-2000-PC 3 5 2,5 2000
BPS 3-10-25-400-PC 3 10 25 400
BPS 3-10-20-500-PC 3 10 20 500
BPS 3-10-17-600-PC 3 10 17 600
BPS 3-10-15-700-PC 3 10 15 700
BPS 3-10-12-800-PC 3 10 12 800
BPS 3-10-11-900-PC 3 10 11 900
BPS 3-10-10-1000-PC 3 10 10 1000
BPS 3-10-6,5-1500-PC 3 10 6,5 1500
BPS 3-10-5-2000-PC 3 10 5 2000
Output voltage: Single polarity negative pulsed
Pulse repetition rate 132 kHz
Controlled level of average current stabilization, in the range 10% - 100%
Stabilized output current control step 0.01 A
Controlled level of average voltage stabilization, in the range 30% - 100%
Stabilized voltage control step 1 V
Controlled level of active power stabilization, in the range 10% - 100%
Stabilized power control step 0.01 kW
Power 3 ph x 220/380VAC +10%, -15%, 45-65 Hz
Power supply up to 3 kW overall dimensions 19", 2U
Power supply up to 5 kW overall dimensions 19", 3U
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VECOR 101 Duranzo Aisle, Irvine, CA92606, USA
Phone: +1-949-394-4466 * Fax: +1-949-451-6813 * E-mail: info@vecorus.com